| 摘要 |
In an angular velocity sensor, an upper electrode (11) of a first piezoelectric element (D1) and a lower electrode (12) of a second piezoelectric element (D2) are connected to an input terminal (21a) of a first Q/V conversion circuit (21), and a lower electrode (12) of the first piezoelectric element (D1) and an upper electrode (11) of the second piezoelectric element (D2) are connected to an input terminal (22a) of a second Q/V conversion circuit (22). Thus, vibration noise components of the quantities of charge generated at the first and second piezoelectric elements (D1, D2) are cancelled out, and Coriolis components of the quantities of charge generated at the first and second piezoelectric elements (D1, D2) are added, whereby only the Coriolis components are extracted. |
