发明名称 GROUP III-V SUBSTRATE MATERIAL WITH PARTICULAR CRYSTALLOGRAPHIC FEATURES AND METHODS OF MAKING
摘要 <p>A substrate including a body comprising a Group III-V material and having an upper surface, the body comprising an offcut angle defined between the upper surface and a crystallographic reference plane, and the body further having an offcut angle variation of not greater than about 0.6 degrees.</p>
申请公布号 EP2761645(A2) 申请公布日期 2014.08.06
申请号 EP20120837261 申请日期 2012.09.28
申请人 SAINT-GOBAIN CRISTAUX ET DETECTEURS 发明人 FAURIE, JEAN-PIERRE;BEAUMONT, BERNARD
分类号 H01L21/20;H01L33/02 主分类号 H01L21/20
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