发明名称 |
GROUP III-V SUBSTRATE MATERIAL WITH PARTICULAR CRYSTALLOGRAPHIC FEATURES AND METHODS OF MAKING |
摘要 |
<p>A substrate including a body comprising a Group III-V material and having an upper surface, the body comprising an offcut angle defined between the upper surface and a crystallographic reference plane, and the body further having an offcut angle variation of not greater than about 0.6 degrees.</p> |
申请公布号 |
EP2761645(A2) |
申请公布日期 |
2014.08.06 |
申请号 |
EP20120837261 |
申请日期 |
2012.09.28 |
申请人 |
SAINT-GOBAIN CRISTAUX ET DETECTEURS |
发明人 |
FAURIE, JEAN-PIERRE;BEAUMONT, BERNARD |
分类号 |
H01L21/20;H01L33/02 |
主分类号 |
H01L21/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|