发明名称 |
CARRIER FOR THIN GLASS SUBSTRATES AND USE THEREOF |
摘要 |
<p>A carrier for supporting a large area glass substrate having an area of at least 0.174 m² in a substrate processing chamber is described. The carrier includes at least one fixation element configured to hold the substrate at the substrate's upper side and configured to carry at least 60% of the substrate's weight during processing of the substrate, and at least one support portion adapted to hold the substrate at an essentially vertical orientation during processing of the substrate.</p> |
申请公布号 |
EP2761051(A1) |
申请公布日期 |
2014.08.06 |
申请号 |
EP20110773699 |
申请日期 |
2011.09.27 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BRÜNING, ANDRE;HEIMEL, OLIVER;HINTERSCHUSTER, REINER;WOLF, HANS GEORG |
分类号 |
C23C14/50 |
主分类号 |
C23C14/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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