Structures for indexing dice

摘要

A method of indexing a plurality of dice (410;710;810) obtained from a material wafer (100) comprising a plurality of stacked material layers, each die being obtained in a respective die position (1-16) in the wafer, the method including providing a visible index (420;720;820) on each die indicative of the respective die position, wherein providing the visible index on each die includes: forming in a first material layer of the die a reference structure (422,425,430;725,730;730,825, 826) adapted to defining a mapping of the wafer; and forming in a second material layer of the die a marker (435;745,775,780;775,780,845) associated with the reference structure, a position of the marker with respect to the reference structure being adapted to provide an indication of the die position in the wafer.