| 发明名称 |
Membrane-based sensor device and method for manufacturing the same |
| 摘要 |
A sensing device has a semiconductor substrate (1) with an opening (12) and a membrane (13) spanning the opening (12). A heater (5) is arranged on the membrane (13). To reduce the thermal conductivity of the membrane (13), a recess (17) is etched into the membrane (13) from below. |
| 申请公布号 |
EP2762864(A1) |
申请公布日期 |
2014.08.06 |
| 申请号 |
EP20130405014 |
申请日期 |
2013.01.31 |
| 申请人 |
SENSIRION AG |
发明人 |
SUNIER, ROBERT;KUEMIN, CYRILL;HUMMEL, RENÉ |
| 分类号 |
G01N27/12;B81B7/00;B81C1/00;G01F1/684 |
主分类号 |
G01N27/12 |
| 代理机构 |
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代理人 |
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| 地址 |
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