摘要 |
A device for defect detection of a laser-processed surface of the present invention comprises a laser generating device (20) irradiating laser to a material (T); a laser detection device (30) receiving scattering laser in accordance with a laser scattering angle of the material (T); and a processing device (40) which figures out a starting point which power of the scattering laser increases and a point which power of the scattering laser rapidly increases from the scattering laser data thereby measuring a laser incident point and surface damage of the material (T) by laser processing and a damage point in real-time without using additional light sources. |