Large-sized front opening unified wafer POD

摘要

A FOUP (front opening unified pod) is disposed with a plurality of supporting pieces, the positions of which are calibrated to be symmetrical for the supporting pieces to horizontally support wafers in the pod, and with an OHT pad (overhead hoist transport pad), a major function of which is to evenly distribute the weight of the FOUP and the wafers so that the transportation of the FOUP and the wafers by the OHT head can be further stabilized and more weight can be loaded to meet the demands of the process.

主权项

1. A wafer container comprising a container body composed of a left side, a right side, an upper side, and a lower side joined with a rear side for forming an accommodation space in said container body, an opening opposite to said rear side, and a door, sized to a corresponding size of said opening of said container body and to close said opening of said container body, wherein said wafer container is characterized in that:
a plurality of first through holes are formed at front ends and rear ends of said left side and of said right side of said container body; a plurality of positioning frames are formed with a plurality of second through holes, said plurality of second through holes being disposed in correspondence to said plurality of first through holes, each of said plurality of positioning frames being joined with some of said second through holes and some of said first through holes via a plurality of first lock-fasteners for said plurality of positioning frames to be lock-fastened to outer sides of said left side and said right side; and a plurality of supporting modules, each of said plurality of supporting modules having a plurality of protruding lock-fastening holes formed on one side surface of each of said plurality of supporting modules, and a plurality of ribs horizontally arranged at intervals formed on another side surface of each of said plurality of supporting modules, said plurality of protruding lock-fastening holes of each of said plurality of supporting modules penetrating through the rest of said plurality of first through holes on said left side and said right side of said container body and through rest of said plurality of second through holes on each of said positioning frames, said plurality of supporting modules being fastened to inner sides of said left side and said right side via a plurality of second lock-fasteners.