Method for producing gallium nitride layer and seed crystal substrate used in same

摘要

A gallium nitride layer is produced using a seed crystal substrate by flux method. The seed crystal substrate 8A includes a supporting body 1, a plurality of seed crystal layers 4A each comprising gallium nitride single crystal and separated from one another, a low temperature buffer layer 2 provided between the seed crystal layers 4A and the supporting body and made of a nitride of a group III metal element, and an exposed layer 3 exposed to spaces between the adjacent seed crystal layers 4A and made of aluminum nitride single crystal or aluminum gallium nitride single crystal. The gallium nitride layer is grown on the seed crystal layers by flux method.

主权项

1. A method of producing a gallium nitride layer using a seed crystal substrate by flux method,
wherein said seed crystal substrate comprises a supporting body, a plurality of seed crystal layers each comprising gallium nitride single crystal and separated from one another, a low temperature buffer layer provided between said seed crystal layers and said supporting body and comprising a nitride of a group III metal element, and an exposed layer exposed to spaces between said adjacent seed crystal layers and comprising aluminum nitride single crystal or aluminum gallium nitride single crystal, the method comprising the step of; growing said gallium nitride layer on said seed crystal layers by flux method.