Hybrid conductor through-silicon-via for power distribution and signal transmission

摘要

A method of providing signal, power and ground through a through-silicon-via (TSV), and an integrated circuit chip having a TSV that simultaneously provides signal, power and ground. In one embodiment, the method comprises forming a TSV through a semiconductor substrate, including forming a via in the substrate; and forming a multitude of conductive bars in the via. The multitude of conductive bars include at least one signal bar, at least one power bar, and at least one ground bar. The method further comprises connecting the at least one power bar to a power voltage source to apply power through the TSV; connecting the at least one ground bar to a ground voltage; and connecting the at least one signal bar to a source of an electronic signal to conduct the signal through the TSV and to form a hybrid power-ground-signal TSV in the substrate.

主权项

1. A method of providing signal, power and ground through a through-silicon-via (TSV), the method comprising:
forming a TSV through a semiconductor substrate, including forming a via in the substrate; and forming a multitude of conductive bars in the via, said multitude of bars including at least one signal bar, at least one power bar, and at least one ground bar to combine signal, power and ground in one TSV, and including forming the power and ground bars on opposite sides of the signal bar in said one TSV; connecting the at least one power bar to a power voltage source to apply power through the TSV; connecting the at least one ground bar to a ground voltage; and connecting the at least one signal bar to a source of an electronic signal to conduct the signal through the TSV and to form a hybrid power-ground-signal TSV in the substrate.