Micromechanical Coriolis rate of rotation sensor

摘要

The invention relates to a micromechanical Coriolis rate of rotation sensor for detecting rates of rotation with components around measuring axes in three spatial directions which are orthogonal to one another. The Coriolis rate of rotation sensor has a substrate, a detection mass and at least two drive masses, wherein the drive masses can each be driven to perform a primary movement relative to the substrate. The direction of the primary movement of one of the at least two drive masses is perpendicular to the direction of the primary movement of another of the at least two drive masses. The detection mass is coupled to the drive masses. The invention also relates to an Inertial Measurement Unit (IMU) and to a method for detecting rates of rotation in three spatial directions which are orthogonal to one another.

主权项

1. A micromechanical Coriolis rate of rotation sensor for detecting rates of rotation (ΩX, ΩY, ΩZ) with components about measurement axes in three mutually orthogonal spatial directions (X, Y and Z axis), comprising:
a substrate (1); a detection mass (3); at least two drive masses (4a, 4b, 4c, 4d), the drive masses (4a, 4b, 4c, 4d) each driveable relative to the substrate to provide a primary movement (VXa, VYb, VXc, VYd), wherein the direction of the primary movement (VXa, VYb, VXc, VYd) of one of the at least two drive masses (4a, 4c) is perpendicular to the direction of the primary movement (VXa, VYb, VXc, VYd) of another of the at least two drive masses (4b, 4d); wherein the detection mass (3) is coupled to the drive masses (4a, 4b, 4c, 4d) in such a manner that the detection mass (3), due to a secondary movement of the drive masses (4a, 4b, 4c, 4d) due to Coriolis force under action of an external rate of rotation to be detected can be excited to perform a detection movement; and wherein the detection mass (3) can carry out rotational oscillations about axes of rotation in the three mutually orthogonal spatial directions (X, Y, Z) relative to the substrate as a detection movement.