发明名称 Method and apparatus for utilizing in-situ measurements techniques in conjunction with thermoelectric chips (TECs)
摘要 According to one aspect of the present invention, an apparatus includes a surface and a first array. The surface emits radiation, and the first array is arranged over the surface and arranged to provide cooling to the surface, the first array including a plurality of TECs. At least a first sensing arrangement is substantially integrated with the first array, wherein the first sensing arrangement is arranged to make a non-contact measurement associated with the surface. The apparatus also includes a controller arranged to obtain the non-contact measurement and to use the non-contact measurement to control the cooling provided by the first array.
申请公布号 US8794011(B2) 申请公布日期 2014.08.05
申请号 US201113270522 申请日期 2011.10.11
申请人 Nikon Corporation 发明人 Phillips Alton H.;Ohta Akio;Watson Douglas C.
分类号 F25B21/02 主分类号 F25B21/02
代理机构 代理人
主权项 1. An apparatus comprising: a first array, the first array being arranged over a surface and arranged to provide cooling to the surface, the first array including a plurality of thermoelectric chips (TECs), the surface being arranged to emit radiation; at least a first sensing arrangement, the first sensing arrangement being substantially integrated with the first array, wherein the first sensing arrangement is arranged to make a non-contact measurement associated with the surface; and a controller, the controller being arranged to obtain the non-contact measurement and to use the non-contact measurement to control the cooling provided by the first array.
地址 Tokyo JP