发明名称 |
Method and apparatus for utilizing in-situ measurements techniques in conjunction with thermoelectric chips (TECs) |
摘要 |
According to one aspect of the present invention, an apparatus includes a surface and a first array. The surface emits radiation, and the first array is arranged over the surface and arranged to provide cooling to the surface, the first array including a plurality of TECs. At least a first sensing arrangement is substantially integrated with the first array, wherein the first sensing arrangement is arranged to make a non-contact measurement associated with the surface. The apparatus also includes a controller arranged to obtain the non-contact measurement and to use the non-contact measurement to control the cooling provided by the first array. |
申请公布号 |
US8794011(B2) |
申请公布日期 |
2014.08.05 |
申请号 |
US201113270522 |
申请日期 |
2011.10.11 |
申请人 |
Nikon Corporation |
发明人 |
Phillips Alton H.;Ohta Akio;Watson Douglas C. |
分类号 |
F25B21/02 |
主分类号 |
F25B21/02 |
代理机构 |
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代理人 |
|
主权项 |
1. An apparatus comprising:
a first array, the first array being arranged over a surface and arranged to provide cooling to the surface, the first array including a plurality of thermoelectric chips (TECs), the surface being arranged to emit radiation; at least a first sensing arrangement, the first sensing arrangement being substantially integrated with the first array, wherein the first sensing arrangement is arranged to make a non-contact measurement associated with the surface; and a controller, the controller being arranged to obtain the non-contact measurement and to use the non-contact measurement to control the cooling provided by the first array. |
地址 |
Tokyo JP |