Method for forming imagers

摘要

A micro-lens array with reduced or no empty space between individual micro-lenses and a method for forming same. The micro-lens array is formed by patterning a first set of micro-lens material in a checkerboard pattern on a substrate. The first set of micro-lens material is reflowed and cured into first micro-lenses impervious to subsequent reflows. Then, a second set of micro-lens material is patterned in spaces among the first micro-lenses, reflowed and cured into second micro-lenses. The reflows and cures can be conducted under different conditions, and the micro-lenses may be differently sized. The conditions of the reflows can be chosen to ensure that the focal lengths of micro-lenses are optimized for maximum sensor signal.

主权项

1. A method of forming a micro-lens array, comprising:
patterning a first set of micro-lens material onto a substrate; reflowing the first set of micro-lens material under first reflow conditions; curing the first set of micro-lens material to form a plurality of first micro-lenses; patterning a second set of micro-lens material onto the substrate; reflowing the second set of micro-lens material under second reflow conditions that are different than the first reflow conditions; curing the second set of micro-lens material to form a plurality of second micro-lenses; and wherein the second reflow conditions differ from the first reflow conditions in one or more of an exposure of the micro-lens material, a bleaching dosage of the micro-lens material, and a pre-treatment of the micro-lens material to change its glass transition temperature.