Method for manufacturing pattern formed body

摘要

The main object of the present invention is to provide a method for manufacturing a pattern formed body by the electric field jet method, capable of stabilizing the discharge amount and the discharge direction of a liquid. The present invention achieves the object by providing a method for manufacturing a pattern formed body characterized in that a pattern is formed on a substrate by: discharging a liquid from a discharge orifice by applying a voltage between a first electrode, disposed in the vicinity of the discharge orifice of a nozzle of a discharge head, and a second electrode, disposed in between the discharge orifice and the substrate, having an opening for discharge; and adhering the liquid onto the substrate by passing through the opening for discharge of the second electrode.

主权项

1. A liquid discharge device comprising: a discharge head having a supply port, a nozzle for discharging a liquid supplied from the supply port from a discharge orifice, and a first electrode disposed in the vicinity of the discharge orifice; a second electrode, disposed with a predetermined gap in a liquid discharge direction of the liquid with respect to the discharge head, having an opening for discharge defined in a surface of the second electrode; a voltage control section for controlling the voltage applied to the first electrode and the second electrode; and a stage, for fixing the substrate, disposed so that the stage is facing to the discharge head,
wherein the opening for discharge defined in the surface of the second electrode has a structure which is configured to provide a uniform potential around a circumference of the opening for discharge defined in the surface of the second electrode, the discharge head and the stage is moved relatively, the liquid is discharged onto the substrate while applying a voltage between the first electrode and the second electrode, by passing through the opening for discharge of the second electrode, and the discharge direction of the liquid is changed by changing the relative position of a central part of the discharge orifice of the discharge head in a direction parallel to a plane of the second electrode and the substrate, relative to a central part the opening for discharge of the second electrode.