Encoder apparatus using liquid to suppress detection failure

摘要

An encoder apparatus comprises a first scale member with a scale region on which a scale is arranged; a detector that detects light from the scale region; and a retaining member with a retaining surface that is arranged so as to face a surface of the first scale member including the scale region via a predetermined gap, and that retains a liquid at least between the retaining surface and the first scale member.

主权项

1. An optical encoder comprising:
a scale member with a scale region including a scale, the scale region being more lyophilic than a region arranged next to the scale region; a detector that detects light from the scale region; and a retaining member with a retaining surface that faces the scale region and the region via a gap and retains a liquid between the retaining surface and the scale region, wherein the scale member moves relative to the detector in a state with the scale region being in contact with the liquid.