APPARATUS OF CONTINUOUS CZOCHRALSKI SINGLE CRYSTAL SILICON INGOT GROWER

摘要

PURPOSE: An apparatus for manufacturing a single crystal silicon ingot is provided to reuse an inner crucible by connecting the inner crucible to an upper heat shield. CONSTITUTION: A crucible (110) is installed in a chamber. An inner crucible (130) is located in the crucible. A susceptor (120) surrounds the crucible. A heater (190) heats the crucible. A heat shield (150) prevents the heat of the heater from being released.