Inline defect analysis for sampling and SPC

摘要

In one embodiment, an inline defect analysis method includes receiving geometric characteristics of individual defects and design data corresponding to the individual defects, determining which of the individual defects are likely to be nuisance defects using the geometric characteristics and the corresponding design data, and refraining from sampling the defects that are likely to be nuisance defects.

主权项

1. A computer-implemented method comprising:
receiving, with a system having an inline defect analyzer, geometric characteristics of individual defects and design data corresponding to the individual defects; separating the individual defects into systematic defects and random defects; calculating a criticality factor (CF) value for the individual random defects using the geometric characteristics and design data of the individual random defects; refraining, with the system having the inline defect analyzer, from sampling the defects that are likely to be nuisance defects, wherein the individual defects are separated into systematic defects and random defects using design-based binning in which a bin size threshold is set for separating the systematic and random defects with the bin size threshold being based on a random probability of the individual defects to be located on a given structure.