| 发明名称 | Optical system polarizer calibration | ||
| 摘要 | An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence. The apparatus decouples the polarization effect of the system from the polarization effect of the sample. The apparatus includes a substrate with a polarizer disposed on the surface. An indicator on the substrate indicates the polarization orientation of the polarizer, which is in a predetermined orientation with respect to the substrate. | ||
| 申请公布号 | US8797534(B2) | 申请公布日期 | 2014.08.05 |
| 申请号 | US201314034869 | 申请日期 | 2013.09.24 |
| 申请人 | KLA-Tencor Corporation | 发明人 | de Veer Johannes D.;Poslavsky Leonid;Zhuang G. Vera;Krishnan Shankar |
| 分类号 | G01J4/00 | 主分类号 | G01J4/00 |
| 代理机构 | Luedeka Neely Group, P.C. | 代理人 | Luedeka Neely Group, P.C. ;Barnes Rick |
| 主权项 | 1. An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence, by decoupling a polarization effect of the system from a polarization effect of a sample, the apparatus comprising a substrate having a polarizer disposed on a surface thereof, with an indicator on the substrate for indicating a polarization orientation of the polarizer, where the polarization orientation is in a predetermined orientation with respect to the substrate, and the polarizer configured to exhibit substantially complete extinction of system light in one orientation and substantially no absorption of system light in another orientation. | ||
| 地址 | Milpitas CA US | ||