| 摘要 |
A nozzle structure of a high speed slit coater is provided to produce a coating product of stable and uniform quality and to minimize air resistance by removing a particle remaining on a surface of a substrate by a windbreak. A slit nozzle(100) forms a cavity(130) at a space in which a chemical solution is received between a pair of plate bodies(110,120). An outlet(150) having a gap(140) of a slit type for exhausting the chemical solution is positioned in a bottom end of the cavity. A pair of plate bodies forms an upward tilt surface(111) toward an outer side of the outlet. One of a pair of plate bodies integrally forms a windbreak(160) from the upward tilt surface to a downward tilt direction. A space part(170) is positioned between the windbreak and the outlet. A bottom part of the space part is wider than a top part of the space part. |
