| 摘要 |
Provided in the present invention is a maskless exposure apparatus which is characterized by comprising a light source part outputting light; a DMD array part with mirror pixels reflecting the light outputted from the light source part to a stage where a substrate is mounted or reflecting the light to the outside; a DMD controlling part providing a controlling signal to the DMD array part and transferring a data file with an image to be exposed; and a light modulation part inducing and radiating the light reflected from a micro mirror device in a direction of the substrate, wherein a transmitting part transmitting the light, a non-transmitting part not transmitting the light, and a semi-transmitting part selectively transmitting the light are defined in the DMD array part; and turn-on and turn-off operations of the mirror pixels of the DMD array part defined as an area corresponding to the semi-transmitting part are changed frame-by-frame. |
