发明名称 treatment method for surface of substrate, method of fabricating image sensor by using the treatment method and image sensor fabricated by the same
摘要 Provided may be a treatment method to remove defects created on the surface of a substrate, a method of fabricating an image sensor by using the treatment method, and an image sensor fabricated by the same. The treatment method may include providing a semiconductor substrate including a surface defect, providing a chemical solution to a surface of the semiconductor substrate, and removing the surface defect by consuming the surface of the semiconductor substrate and forming a chemical oxide layer on the semiconductor substrate.
申请公布号 KR101425619(B1) 申请公布日期 2014.08.04
申请号 KR20080005079 申请日期 2008.01.16
申请人 发明人
分类号 H01L21/306;H01L27/146 主分类号 H01L21/306
代理机构 代理人
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