THE METHOD FOR MANUFACTURING THE BACK CONTACT TYPE SOLAR CELL

摘要

The present invention relates to a method of manufacturing a back-contact solar cell capable of manufacturing the back-contact solar cell having excellent efficiency by selectively activating a rear-passivation layer using laser. According to the present invention, the method of manufacturing the back-contact solar cell includes: 1) a step of forming an n+ layer and a reflection prevention layer on the front surface of an n-type silicon substrate, and forming an n-type region and a p-type region; 2) a step of forming a passivation layer on the back surface of the silicon substrate through an atomic layer deposition process; 3) a step of selectively annealing a part of the passivation layer on which the p-type region is formed by applying heat over 500°C; 4) a step of depositing and forming a reflection prevention layer on the back surface of the substrate; and 5) a step of forming electrodes each of which is connected to each of the n-type and the p-type region on the reflection prevention layer on the back surface of the substrate.