发明名称 APPARATUS AND METHOD FOR BONDING
摘要 The present invention relates to a bonding apparatus and a method thereof. A bonding apparatus according to one embodiment of the present invention includes a support unit which is mounted on at least one surface of a substrate; a bonding tool which bonds a device to the substrate; and a cleaning assembly which is installed at the support unit and cleans one surface of the support unit.
申请公布号 KR20140095301(A) 申请公布日期 2014.08.01
申请号 KR20130008127 申请日期 2013.01.24
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 EOM, DONG BIN
分类号 H01L21/58 主分类号 H01L21/58
代理机构 代理人
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