发明名称 Vacuum chamber
摘要 Disclosed is a vacuum chamber. The vacuum chamber is a vacuum chamber which includes a first and a second basic material which are combined with each other and divide an inner space. The combination part of the first and the second basic material includes an inner welding part which faces the inner space, and an outer welding part which is formed in the outer part which is opposite to the inner space. The inner welding part includes a welding flux welding part which includes a welding flux. The outer welding part includes an autogenous welding part which doesn′t include a welding flux. According to the present invention, the penetration of a foreign material into a gap of the vacuum chamber can be effectively prevented.
申请公布号 KR101424127(B1) 申请公布日期 2014.08.01
申请号 KR20120114197 申请日期 2012.10.15
申请人 发明人
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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