| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device which performs astigmatism correction of charged particle beams with ease and excellent repeatability.SOLUTION: On a circumference with a beam axis as a center, 4 N (N: natural number) probe groups are arranged at a fixed division angle, and each generates a static electric field or a magnetic field which is alternately independent in an X-axis direction and a Y-axis direction. In a charged particle beam device, setting of an output value of voltage or current with respect to a plurality of poles is made by a calculation part, an angle &thetas;2 in the X-axis direction X1 and an angle &thetas;1 in the Y-axis direction Y1 is determined as the azimuth, and through adjustment of the rotational angle and/or quantity of two virtual vectors 200 having strength of the output value as an absolute value, the output value of the voltage or current with respect to a plurality of corresponding poles is simultaneously set by the calculation part. |
