| 发明名称 |
SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE |
| 摘要 |
Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a base having a first side and a second side; a gas distribution plate disposed proximate the second side of the base; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the base; and a thermal gasket disposed between the base and gas distribution plate. |
| 申请公布号 |
US2014209027(A1) |
申请公布日期 |
2014.07.31 |
| 申请号 |
US201313833257 |
申请日期 |
2013.03.15 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LUBOMIRSKY DMITRY;KNYAZIK VLADIMIR;NOORBAKHSH HAMID;DELLA ROSA JASON;YE ZHENG JOHN;SUN JENNIFER Y.;BANDA SUMANTH |
| 分类号 |
H01L21/02;B05B1/00 |
主分类号 |
H01L21/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A showerhead for use in a semiconductor processing chamber, comprising:
a base having a first side and an opposing second side; a gas distribution plate disposed proximate the second side of the base; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the base; and a thermal gasket disposed between the base and gas distribution plate. |
| 地址 |
Santa Clara CA US |
