DEPOSITION MASK AND DEPOSITION APPARATUS HAVING THE SAME

摘要

A deposition apparatus includes a deposition chamber, a deposition source, and a deposition mask. The deposition source is disposed in the deposition chamber and provides a deposition material to a deposition substrate. The deposition mask includes a body portion and a carbon layer. The carbon layer is disposed on a first surface making contact with the deposition mask and includes at least one of carbon nanotube or graphene.

主权项

1. A deposition mask comprising:
a body portion that includes a first surface in contact with a deposition substrate and a second surface facing the first surface and a plurality of openings formed penetrating through the first surface and the second surface; and a carbon layer disposed on at least the first surface and including at least one of a carbon nanotube or a graphene.