| 摘要 |
PROBLEM TO BE SOLVED: To provide a glass substrate polishing method and polishing device capable of providing a glass substrate that is excellent in parallelism.SOLUTION: A glass substrate polishing method is characterized in that based on a detection value of a power or current of a motor, which shifts the positions of plural glass substrates abutting against a polishing surface of a surface plate of a polishing device, a polishing condition for the glass substrates is controlled in order to diminish a polishing speed difference on the polishing surface. The polishing device includes the surface plate having the polishing surface, a carrier capable of retaining the plural glass substrates to be polished with the polishing surface, the motor that shifts the relative positions of the polishing surface and the carrier, and a control unit that controls the polishing condition for the glass substrates so as to diminish the polishing speed difference on the polishing surface on the basis of the detection value of the power or current of the motor. |
