发明名称 MEMORY ARRAY HAVING SEMICONDUCTOR STRUCTURE WHICH ARE ADJACENT TO EACH OTHER AND SUBSTANTIALLY VERTICAL, AND FORMATION OF THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a memory array, and a method for forming the same.SOLUTION: One memory array has memory cell strings formed so as to be adjacent to semiconductor structures 455 which are separated from each other, are substantially vertical, and are adjacent to each other, and the separated semiconductor structure connects memory cells 472 of each of the strings in series. Two dielectric pillars 445 may be formed of a dielectric formed in a single opening. Each of the dielectric pillars has a pair of memory cell strings which are adjacent to the dielectric pillars. At least one memory cell out of one upper string out of one pillar, and at least one memory cell out of the upper string out of the other pillar are connected to an access line 480 in common.</p>
申请公布号 JP2014140054(A) 申请公布日期 2014.07.31
申请号 JP20140037681 申请日期 2014.02.28
申请人 MICRON TECHNOLOGY INC 发明人 LIU ZENGTAO
分类号 H01L21/336;H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/336
代理机构 代理人
主权项
地址