| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a structure that prevents a wiring pattern on a body to be processed from being damaged by abnormal discharge generated by influence of an electric field formed between a pair of external electrodes at a light irradiation device that comprises an excimer lamp placing one pair of external electrodes on the upside and downside of the outer surface of an arc tube and a housing accommodating the excimer lamp and having an opening for light extraction on the lower side, and lower voltage is applied to the lower side external electrode facing the body to be processed among the pair of external electrodes, and higher voltage is applied to the upper side external electrode.SOLUTION: A structure is characterized by comprising an electric field shield member for shielding an electric field formed between a higher voltage side external electrode and a lower voltage side external electrode, at a position along the longitudinal direction of an excimer lamp and between the higher voltage side external electrode and a body to be processed in an opening for light extraction on a housing.</p> |
