Electrical Connector, Electrical Connection System and Lithographic Apparatus

摘要

An electrical connector comprises a high voltage pad and a high voltage plate. When connected to another electrical connector, the two plates, which are at the same voltage as the pads, form a region of high voltage in which the field is low. The pads are positioned in that region. An electrostatic clamp of an EUV lithographic apparatus may have such a pad and plate, for connecting to the electrical connector. By placing the interconnection in a low field region, triple points (points of contact between a conductor, a solid insulator and a gas) may be present in that region.

主权项

1. An electrical connection system comprising:
an electrical connector comprising:
an outer shield layer,an outer insulating layer,a first high voltage plate,an inner insulating layer, anda first high voltage pad, wherein the first high voltage pad is smaller than the first high voltage plate and lies substantially wholly within the first high voltage plate when viewed in a first direction perpendicular to a first plane of the first high voltage plate; and an electrostatic clamp comprising:
a second high voltage pad configured to electrically connect to a component external to the electrostatic clamp; anda second high voltage plate substantially parallel to the second high voltage pad,wherein the second high voltage pad is smaller than the second high voltage plate and lies substantially wholly within the second high voltage plate when viewed in a second direction perpendicular to a second plane of the second high voltage plate, andwherein the first high voltage pad is in electrical contact with the second high voltage pad.