UV-Lichtquelle mit kombinierter Ionisation und Bildung von Excimern

摘要

The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber wherein the chamber has at least one area (37, 39) having several gas-filled plasma chambers (11 12), transparent to UV light and/or VUV light. A first group (11) of plasma chambers is filled with an ionizable gas containing mercury and a second group (12) of plasma chambers is filled with a gas that forms excimers when suitably excited.