PHYSICAL QUANTITY SENSOR AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To suppress variations in a characteristic of a resistor for detecting a physical quantity in a physical quantity sensor.SOLUTION: A manufacturing method of a physical quantity sensor is configured to execute: a preparing step of preparing a component in which a front surface structure 22 is formed on a front surface 21a of a substrate 21; then a protective film simultaneously-forming step of simultaneously forming a front surface side protective film 23 on the front surface structure 22 and a rear surface side protective film 24 on a rear surface 21b of the substrate 21 (Fig. 4(a)); then a contact forming step of forming pads 25 for electrically connecting a resistor 27 and externals; subsequently an opening forming step of forming an opening 24a which exposes the rear surface 21b of the substrate 21 at a portion of the rear surface side protective film 24 corresponding to a groove part 21c (Fig. 4(c)); and further an etching step of forming the groove part 21c in the substrate 21 by etching the substrate 21 while using as a mask the rear surface side protective film 24 in which the opening 24a is formed (Fig. 4(d)).