发明名称 SINGLE-CRYSTAL INGOT GROWTH APPARATUS
摘要 <p>Disclosed is a single-crystal ingot growth apparatus including a chamber, a crucible placed within the chamber and configured to accommodate a melt that is a raw material for single-crystal growth, a top insulator located at an upper end of the crucible, the top insulator having a central first opening and a second opening provided between an inner circumferential surface and an outer circumferential surface of the top insulator, a camera configured to capture an image of the melt and a single-crystal ingot that is being grown, through the first opening and the second opening and to output image data, and a detector configured to calculate a diameter of the single-crystal ingot that is being grown, based on the image data.</p>
申请公布号 WO2014115948(A1) 申请公布日期 2014.07.31
申请号 WO2013KR08660 申请日期 2013.09.27
申请人 LG SILTRON INCORPORATED 发明人 AHN, SEONG CHUL
分类号 C30B17/00;C30B15/00;C30B29/20;H01L33/00 主分类号 C30B17/00
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