| 发明名称 |
APPARATUS AND METHOD OF DETECTING A DEFECT OF A SEMICONDUCTOR DEVICE |
| 摘要 |
A semiconductor device defect detecting apparatus including: a sensor disposed on semiconductor process equipment, the sensor configured to detect a signal emitted from a semiconductor device in contact with the semiconductor process equipment; and a signal analyzer configured to determine whether the semiconductor device is defective based on the detected signal in a predetermined frequency range. |
| 申请公布号 |
US2014208850(A1) |
申请公布日期 |
2014.07.31 |
| 申请号 |
US201313753111 |
申请日期 |
2013.01.29 |
| 申请人 |
Kim Geun-woo;Kim Hyun;Yoo Yun-sik;Kim Sang-jun;Park Jae-yong;Chung Tae-gyeong |
发明人 |
Kim Geun-woo;Kim Hyun;Yoo Yun-sik;Kim Sang-jun;Park Jae-yong;Chung Tae-gyeong |
| 分类号 |
G01N29/14 |
主分类号 |
G01N29/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A semiconductor device defect detecting apparatus, comprising:
a sensor disposed on semiconductor process equipment, the sensor configured to detect a signal emitted from a semiconductor device in contact with the semiconductor process equipment; and a signal analyzer configured to determine whether the semiconductor device is defective based on the detected signal in a predetermined frequency range. |
| 地址 |
Chungcheongnam-do KR |
