ARTICLE HAVING FINELY RUGGED STRUCTURE ON SURFACE THEREOF, AND PRODUCTION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an article having a finely rugged structure comprising silica on the surface thereof, and to provide a production method of the article having the finely rugged structure on the surface thereof, in which method the article can be obtained easily at a low cost.SOLUTION: The production method of the article having the finely rugged structure on the surface thereof comprises: a step (1) of applying a silica precursor onto a mold having the finely rugged structure on the surface thereof to form a coating film layer; a step (2) of applying dry etching treatment to the coating film layer by using oxygen-containing gas to change the coating film layer into a silica layer; a step (3) of releasing the silica layer for the mold. It is preferable that the oxygen-containing gas does not contain a fluorine-based gas.