| 摘要 |
The present invention is provided with: an insulating substrate (2) having a gas inlet (4), a gas outlet (6), and an internal flow channel; a valve mechanism including a MEMS valve element (14) that is directly mounted to the front surface or back surface of the insulating substrate (2) and that is connected to the internal flow channel via a port passing through the internal flow channel; a pressure sensor part including a MEMS pressure sensor element (16) that is directly mounted to the front surface or back surface of the insulating substrate (2) and that is connected to the internal flow channel via a port passing through the internal flow channel; and a controller (22) for performing feedback control on the valve mechanism on the basis of a detection signal from the pressure sensor part. |
