| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an optical structure used in an optical image-formation process, capable of eliminating an immersion liquid membrane or dispersion of immersion liquid to an immersion component which should not be got wet by immersion liquid.SOLUTION: An optical structure includes: an optical component 108; an immersion liquid region 109; and a liquid-repellent device 111. During an optical-formation process, the immersion liquid region is positioned next to the optical component and is filled with an immersion liquid 109.1. The optical component includes: a first surface region 108.1 and a second surface region 108.2. The first surface region is got wet with the immersion liquid during the optical image-formation process. During the image-formation process, the liquid repellent device at least temporarily generates an electric field on the second surface region, and causes a repulsive force in a portion that reacts to the electric field with regard to the immersion liquid incidentally contacting the second surface region. The repulsive force has a direction so as to repel the immersion liquid from the second surface region.</p> |
