发明名称 |
PATTERN FORMATION METHOD AND PATTERN FORMATION APPARATUS |
摘要 |
According one embodiment, a pattern formation method forming a resist layer on a pattern formation surface by pressing a template provided with a concave-convex from above the resist layer to form a resist pattern on the pattern formation surface, includes: forming a resist layer in a first region having an area smaller than an area of the pattern formation surface and in a second region other than the first region of the pattern formation surface; pressing a template against the resist layer; irradiating the resist layer with light via the template to form a first resist layer in the first region, curing of the first resist layer being suppressed, and form the resist pattern including a second resist layer, curing of the second resist layer proceeds in the second region; and removing the first resist layer from the first region, the curing of the first resist layer being suppressed. |
申请公布号 |
US2014213058(A1) |
申请公布日期 |
2014.07.31 |
申请号 |
US201313953921 |
申请日期 |
2013.07.30 |
申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
Matsunaga Kentaro;Komine Nobuhiro;Yoneda Eiji |
分类号 |
H01L21/308;H01L21/67 |
主分类号 |
H01L21/308 |
代理机构 |
|
代理人 |
|
主权项 |
1. A pattern formation method forming a resist layer on a pattern formation surface by pressing a template provided with a concave-convex from above the resist layer to form a resist pattern on the pattern formation surface, the method comprising:
forming a resist layer in a first region having an area smaller than an area of the pattern formation surface and in a second region other than the first region of the pattern formation surface; pressing a template against the resist layer; irradiating the resist layer with light via the template to form a first resist layer in the first region, curing of the first resist layer being suppressed, and form the resist pattern including a second resist layer, curing of the second resist layer proceeds in the second region; and removing the first resist layer from the first region. |
地址 |
Minato-ku JP |