| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and an apparatus for scribing a silicon carbide board which allow an effective vertical crack to be produced continuously from a scribe starting point.SOLUTION: An apparatus for scribing a silicon carbide board comprises: a horizontal table 3 which fixes a silicon carbide board 2 under vacuum suction; a feed screw 5 and a Y axis control motor 6 which move the table 3 along guide rails 4 and 4 under scribe numerical control; a guide rail device body 7 which is installed along an X axis direction above the table 3; a carriage 8 which is attached such that the carriage 8 moves to the guide rail device body 7 by being guided in the X axis direction; a feed screw and an X axis control motor 9 which move, under numerical control, the carriage 8 in the X axis direction; and a scribe head 10 which is disposed on the carriage 8.</p> |
