DIFFERENTIAL PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF

摘要

The invention relates to a differential pressure sensor (1) comprising a measurement membrane (10), which is arranged between two counter bodies (20) and is connected pressure-tight to each of the counter bodies (20) by means of a respective first insulating layer (26) so as to form a pressure chamber between the counter bodies and the measurement membrane. The insulating layer comprises silicon oxide in particular. The differential pressure sensor also has an electrical transducer for measuring a pressure-dependent deflection of the measurement membrane. The counter bodies (20) have support points (27), which the measurement membrane (10) at least partially contacts in the event of an overload. The support points (10) have position-dependent heights h. The differential pressure sensor is characterized in that the support points (27) are formed by isotropic etching in the first insulating layer (26), and the respective height h of each support point is a function of an extension of a base of the support point in the reference plane.