APPARATUS FOR SUBSTRATE LOADING

摘要

The present invention provides an apparatus for loading substrates, which loads and unloads the substrates to process the substrates, comprising a main body in which a plurality of substrates are stacked in a vertical direction; a lifting and lowering unit installed on the main body for lifting and lowering the substrates; a transferring unit arranged at an inner side of the main body to come into contact with one side of the substrates and loading or unloading the substrates; and a controller for sensing the substrates and outputting a control signal according to the sensing result. The present invention reduces an overall installation space by arranging components for transferring the substrates at both sides of the substrates when the substrates are loaded, loads and unloads the substrates into or from a chamber for processing the substrates by rollers coming into contact with the sides of the substrates, and deal with various substrate sizes by making it possible to adjust a gap between the rollers for transferring the substrates.