A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.
申请公布号
WO2014116681(A2)
申请公布日期
2014.07.31
申请号
WO2014US12517
申请日期
2014.01.22
申请人
BROOKS AUTOMATION, INC.
发明人
BABBS, DANIEL;CAVENEY, ROBERT, T.;MAY, ROBERT, C.;MAZCZAK, KRYSZTOF, A.