发明名称 |
DEFECT DETECTING SYSTEM AND METHOD |
摘要 |
Disclosed is a system to inspect a defect. The system to detect a defect includes: a first sensor positioned on top of one side of an object being inspected; and a second sensor positioned on top of one side of the object being inspected, while being separated from the first sensor. Here, the system to inspect a defect uses the results detected from the sensors to detect the occurrence and types of defects of the object being inspected. |
申请公布号 |
KR20140094941(A) |
申请公布日期 |
2014.07.31 |
申请号 |
KR20130007625 |
申请日期 |
2013.01.23 |
申请人 |
SEMISYSCO CO., LTD. |
发明人 |
WOO, BONG JOO;LEE, DONG SEOK;KIM, SEONG YONG;PAE, JUNE KI |
分类号 |
G01N21/958 |
主分类号 |
G01N21/958 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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