发明名称 DEFECT DETECTING SYSTEM AND METHOD
摘要 Disclosed is a system to inspect a defect. The system to detect a defect includes: a first sensor positioned on top of one side of an object being inspected; and a second sensor positioned on top of one side of the object being inspected, while being separated from the first sensor. Here, the system to inspect a defect uses the results detected from the sensors to detect the occurrence and types of defects of the object being inspected.
申请公布号 KR20140094941(A) 申请公布日期 2014.07.31
申请号 KR20130007625 申请日期 2013.01.23
申请人 SEMISYSCO CO., LTD. 发明人 WOO, BONG JOO;LEE, DONG SEOK;KIM, SEONG YONG;PAE, JUNE KI
分类号 G01N21/958 主分类号 G01N21/958
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