发明名称 METHOD FOR PRODUCING DOOR PLATE AND DOOR PLATE PRODUCED BY THE SAME
摘要 The present invention relates to a method for manufacturing a door plate and, more specifically, to a method for manufacturing a door plate capable of being used in a vacuum chamber and improving the durability of the door plate and a sealing function. The method for manufacturing the door plate comprises a step for determining the flatness of one surface which touches a seal plate; a step for anodizing a part of the surface in which illumination is controlled; and a step for controlling the illumination by polishing the anodized surface.
申请公布号 KR20140095032(A) 申请公布日期 2014.07.31
申请号 KR20140030488 申请日期 2014.03.14
申请人 NEW GENERATION TECHNOLOGY CO., LTD.;PARK, JONG JIN 发明人 PARK, JONG JIN;BAEK, SANG CHUN
分类号 H01L21/02 主分类号 H01L21/02
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