发明名称 PRESSURIZATION DISC, BONDING DEVICE, AND BONDING METHOD
摘要 The present invention suppresses the occurrence of imbalance in the thickness profile of the circumferential direction of a disc laminate after two discs have been bonded together, even when a notch for angular alignment is present at one place on a side surface of one of the discs. A disc laminate is produced by: applying pressure of equal force to an upper surface of a second disc (W2) having formed on a side surface thereof a notch (N) for angular alignment, by using a pressurization disc (60) that has been centrically aligned with a first disc (W1) and with the second disc (W2), the second disc (W2) being held in opposition above the first disc (W1), which is supported on a stage (50) and the surface of which has been uniformly coated with an adhesive; and bonding together the first disc (W1) and the second disc (W2). A projecting part (61) set to be flush with the lower surface of the pressurization disc (60) in correspondence with the notch (N) of the second disc (W2) is formed on the side surface of the pressurization disc (60).
申请公布号 KR20140094581(A) 申请公布日期 2014.07.30
申请号 KR20147014329 申请日期 2012.10.30
申请人 TAZMO CO., LTD. 发明人 HIROTA TOSHIAKI;SAINO KOSAKU;TANABE MITSURU
分类号 H01L21/603;H01L21/02;H01L21/304;H01L21/683 主分类号 H01L21/603
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