发明名称 SILICONE RUBBER MATERIAL FOR SOFT LITHOGRAPHY
摘要 <p>The present invention relates to a silicone rubber like material and a printing device including a stamp layer (100;201) comprising such a material. The material is suitable for use in soft lithography as it enables stable features having dimensions in the nanometer range to be obtained on a substrate, and also allows for the accommodation onto rough and non-flat substrate surfaces. The invention also relates to methods for manufacturing the silicone rubber like material and stamp layer (100;201) and use thereof in lithographic processes.</p>
申请公布号 EP2288662(B1) 申请公布日期 2014.07.30
申请号 EP20090757953 申请日期 2009.05.29
申请人 KONINKLIJKE PHILIPS N.V. 发明人 VERSCHUUREN, MARCUS, A.
分类号 C08L83/04;B41N1/00;C08L83/07 主分类号 C08L83/04
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