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发明名称
PROCESS AWARE METROLOGY
摘要
Systems and methods for process aware metrology are provided.
申请公布号
EP2758990(A2)
申请公布日期
2014.07.30
申请号
EP20120833283
申请日期
2012.09.20
申请人
KLA-TENCOR CORPORATION
发明人
LIU, XUEFENG;CHUANG, YUNG-HO, ALEX;FIELDEN, JOHN;TSAI, BIN-MING, BENJAMIN;ZHANG, JINGJING
分类号
H01L21/66;G03F7/20
主分类号
H01L21/66
代理机构
代理人
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