| 摘要 |
The present invention provides a hard film which has high wear resistance and excellent peeling resistance and can be prevented from peeling off a base material over a long period of time and a hard film formed body on which the hard film is formed. A hard film (8) has a structure composed of a first mixed layer (8a), consisting mainly of Cr and WC, which is formed directly on a raceway surface (2a) of an inner ring (2) (base material) of a rolling bearing, a second mixed layer (8b), consisting mainly of WC and DLC, which is formed on the first mixed layer (8a), and a surface layer (8c), consisting mainly of DLC, which is formed on the second mixed layer (8b). In the first mixed layer (8a), a content rate of the Cr becomes continuously or stepwise lower and that of the DLC becomes continuously or stepwise higher from a side of the base material toward a side of the second mixed layer (8b). In the second mixed layer (8b), a content rate of the WC becomes continuously or stepwise lower and that of the DLC becomes continuously or stepwise higher from a side of the first mixed layer (8a) toward a side of the surface layer (8c). A content of hydrogen in the second mixed layer (8b) is set to 10 to 45 atomic percent. |
