发明名称 |
COST-EFFECTIVE SINGLE CRYSTAL MULTI-STAKE ACTUATOR AND METHOD OF MANUFACTURE |
摘要 |
This invention pertains to piezoelectric actuators made of single crystal active elements which not only exhibit uniform and superior displacement in the axial direction but also of lower cost to produce than full single crystal ring or tube actuators. Said multi-stake actuator is made up of multiple longitudinal (d33) or transverse (d3i or d32) mode piezoelectric single crystal active elements, bonded together by epoxy with the aid of shaped edge- and top and bottom washer-stiffeners which are configured to suit various application needs. |
申请公布号 |
SG11201403654X(A) |
申请公布日期 |
2014.07.30 |
申请号 |
SGX11201403654 |
申请日期 |
2012.12.31 |
申请人 |
MICROFINE MATERIALS TECHNOLOGIES PTE LTD |
发明人 |
XIA, YUEXUE;GOH, HUILIN, NELLY;LIN, DIAN-HUA |
分类号 |
H01L41/09;B81B3/00;H01L41/277 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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