| 摘要 |
Provided is a hydrostatic gas bearing structure that is robust against load variations and in which the devices installed can be reduced in size and weight. This air bearing (1) comprises: a magnetic-force generating part (11) that generates a magnetic force which attracts an opponent member; a compressed-air supplying part (12) that is arranged around the magnetic-force generating part (11) and discharges compressed air toward the opponent member; a base plate (13) to which the magnetic-force generating part (11) and the compressed-air supplying part (12) are attached; and a ball joint (14) that holds the air bearing (1) such that the inclination thereof can be adjusted freely. The magnetic-force generating part (11) is a permanent magnet, such as a neodymium magnet, formed in the shape of a circular cylinder. The compressed-air supplying part (12) is a disk-shaped member with a through hole (123) formed in the center. The magnetic-force generating part (11) is fitted into this through hole (123). One end surface (121) of the compressed-air supplying part (12) and one end surface (111) of the magnetic-force generating part (11) fitted into the through hole (123) together constitute a support surface (10) that opposes the surface of the opponent member in a non-contact manner. |
